Re: Problem p5000etch SNF 2007-10-29 09:43:16: Ch. C is still offline for handling problem

Adjusted extension wafer drop and pick.

Re: Problem p5000etch SNF 2007-10-29 12:52:58: CH A Metal recipe stopped with RF fault detected in step 2

Run a standard metal recipe w/o problem.

Problem p5000etch SNF 2007-10-29 12:52:58: CH A Metal recipe stopped with RF fault detected in step 2

Problem p5000etch SNF 2007-10-29 09:43:16: Ch. C is still offline for handling problem

Still troubleshooting the handling problem.

Re: Comment p5000etch SNF 2007-10-25 11:20:54: Update on bad pump

Load lock pump has been replaced. Also replaced the purge valve.

Re: Comment p5000etch SNF 2007-10-26 14:52:13: Update

Cesar replaced the load lock purge valve.

Re: Problem p5000etch SNF 2007-10-19 14:25:07: Wafer stuck in Ch.C

Re: Shutdown p5000etch SNF 2007-10-23 08:07:47: Bad load lock pump

Changed foreline purge nupro valve and set l/l purge
to 35mt.

Comment p5000etch SNF 2007-10-26 14:52:13: Update

Load lock pump has been installed. Now having a problem with the pump ballast valve. Unable to set the flow rate. Flow goes to maximum.

Comment p5000etch SNF 2007-10-25 11:20:54: Update on bad pump

Load lock pump is currently being repaired. Should be here by tomorrow.

Shutdown p5000etch SNF 2007-10-23 08:07:47: Bad load lock pump

Load lock circuit breaker trips. Need to replace the pump.